Description
The main purpose of a process cooling fluid is to control or maintain
the constant temperature of the wafer to a certain set point in order to avoid
potential material damage.
Galden® PFPE HT is a line of heat transfer fluids with boiling points
ranging from 55°C to 270°C. Their excellent dielectric properties, high
chemical stability combined with their capacity to operate at very low as well
as elevated temperatures make them the best heat transfer fluids for the
aggressive conditions used in the Semiconductor and Electronic Industry.
Galden® PFPE HT fluids show excellent compatibility with most of the
materials commonly present in heat exchangers. Galden® PFPE systems are
practically maintenance-free with no corrosion hazard. Galden® PFPEdielectric
properties do not change with use with no risk of short circuiting.
Environmentally safe, Galden® PFPE is non-toxic, non-explosive, and will not
damage electronics should any leakage occur. No Flash or Fire Point and No
Auto-ignition Point are additional advantages of Galden® PFPE HT.
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